Quantitative Electron Probe Microanalysis of Thin Films
نویسندگان
چکیده
منابع مشابه
Quantitative Electron Probe Microanalysis
The recognition and understanding of the role of the microstructure in controlling the macroscopic behavior of a material has been a major theme of science and technology throughout the history of NBS/NIST. In materials science, the late 19th century saw the development of the sample preparation procedures we know today as “metallography” and “materialography,” and the emergence of optical micr...
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EPMA has been applied to electron beam evaporated and r.f. sputtered layers of about 200 tig/cm. This includes analysis of trapped argon and oxygen ranging from 0.2 to 10 wt%. For primary electron energies of 5 to 15 keV depth range of X-ray emission may be predicted with an accuracy of ± 10 nm. Errors of quantitative analysis are discussed for various correction models and should not exceed 3....
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Quantitative electron probe analysis is based on models based on the physics or x-ray generation, empirically adjusted to the analyses of specimens of known composition. Their accuracy can be estimated by applying them to a set of specimens of presumably well-known composition.
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An electron microprobe is an electron microscope designed for the non-destructive x-ray microanalysis and imaging of solid materials. It is essentially a hybrid instrument combining the capabilities of both the scanning electron microscope (SEM) and an x-ray fluorescence spectrometer (XRF), with the added features of fine-spot focusing (~ 1 micrometer), optical microscope imaging, and precision...
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ژورنال
عنوان ژورنال: Transactions of the Japan Institute of Metals
سال: 1975
ISSN: 0021-4434,2432-4701
DOI: 10.2320/matertrans1960.16.697